Wet Bench
System details
- Automatic vertical front sash (clear)
- Light curtain for activity monitoring
- Integrated LED lights
- Monitoring of differential pressure and filter loading
- Temperature monitoring of exhaust air
- Programmable logic controller (PLC) for monitoring and controlling of operation, airflows, and equipment
- Supply air filters as required
- Volume flow controllers for supply and exhaust air
- Connections for integrated equipment used in semiconductor production
- Drip tray flushing
- Customized media supply (interior and exterior)
- Remote monitoring and servicing
- Air ionizer
- Quick Dump Rinse (QDR) basin
- Sink or ultrasonic basin
- Acid bath (PVDF, PFA) acc. process with cooling, filtration, recirculation
- Spin coater, vacuum tweezers
- Exhaust air scrubber and exhaust air irrigation
- Base cabinet (vented) with hinged doors or drawers
- Air-recirculation mode possible with suitable activated charcoal filtercharcoal fi lterr
Laminar flow
DIN EN 14175
Modular design
Reduce energy consumption
MK Versuchsanlagen Wet Bench: Innovative design for precision work
In the semiconductor industry, metal-free systems are an integral part of many process and production setups. At MK metal-free Workstations we manufacture metal-free equipment individually tailored to specific processes, developed and designed according to customer requirements. Laminar flow across the entire work area additionally enables operation under the cleanest conditions (e.g., cleanroom class 3 according to DIN EN ISO 14644-1 or better). With controlled supply and exhaust air, the focus is on ensuring both product and user protection simultaneously. Common components such as cleaning sinks, ultrasonic baths, or etching basins are custom-made from suitable materials and installed flush and ergonomically into the system. Process equipment such as spin coaters can also be integrated into the workbenches.
Our metal-free Wet Bench stands out due to its modular design, allowing it to be individually configured to meet your process requirements. The protection of both product and user is our top priority. Product protection is achieved through clean, particle-free workspaces of cleanroom class 3* or better, while user protection is ensured by front-sliding controlled airflow volumes**. The use of various inert plastics provides excellent corrosion resistance.
If there is insufficient supply air capacity available in the building, we offer a version with integrated room air intake.
To reduce operating costs, we also offer a variant with an intelligent control system that lowers energy consumption.
* According to DIN EN ISO 14644-1
** According to DIN EN 14175
Product features
- Metal-free construction (no exposed metal) to prevent contamination and corrosion
- Supply air provided directly from ventilation system (via dedicated duct; Fig. 1) or, alternatively, pulled from room with variable degree of air recirculation (using support fans; Fig. 2)
- Vertical laminar flow achieved though a fine-meshed monofilament fabric diffuser
- Laminar airflow throughout the entire working chamber; air is exhausted through perforated work surface
- Control of supply, recirculated, and exhaust air via the PLC ensures the correct pressure in the working chamber
- Compliant with DIN EN 14175-3 safety and performance standards (containment, air exchange efficiency)
- Simultaneous protection of personnel and samples/products
- Outstanding air and energy efficiency due to optimized and smart airflow management
- Exhaust air can be discharged via air scrubbers or directly transferred to the exhaust air system
- Exhaust air can be recirculated via activated carbon filters (choice of activated carbon depending on used chemicals)
| Technical data | ||
| Materials | PP, PET, POM, PFA, PVDF | |
| Operating voltage | 400V/50Hz 16A or 208V/60Hz 20A | |
| Air requirements | Supply air min. 400 m³/h, exhaust air min. 450 m³/h (width: 1200 mm) | |
| Air velocity in working area | Approx. 0.15 m/s in normal operation | |
| Terminal supply air filters | High-performance HEPA/ULPA filter, class H13 to U16 (depending on requirements) | |
| Cleanroom classes according DIN EN ISO 14644-1 | Class 3 or better „at rest“ | |
| Illuminance | > 750 Lux | |
| Interfaces | Ethernet or other common fieldbus systems and serial interfaces. | |
| Dimensions | 1200 x 975 x 2600 mm (W x D x H), widths 900 mm, 1500 mm and 1800 mm also available | |
| Weight (without equipment) | 260 kg for 1200 mm width (320 kg, 380 kg for wider models) | |
| Dimensions working area | 1180 x 635 x 880 mm (W x D x H), width varies with total width | |
| Working height | 700 mm, 900 mm | |
| Front sash opening height | Individually adjustable via PLC | |
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