Wet Bench
System details
- Front sash with individual settings
- Light curtain for activity monitoring
- Integrated lighting
- Monitoring of filter pressure and diff erential pressure
- Filters for supply air according ISO class
- Monitoring of temperature
- Programmable logic controller (PLC) for monitoring and controlling function, ventilation, equipment
- Connections for integrated equipment in semiconductor production
- Control units for media (hand, foot, display)
- Underfloor flushing
- Media supply acc. customer requirements
- Remote maintenance
- Air ionizer
- Quick-Dump-Rinse basin
- Ultrasonic basin
- Fans for supply and exhaust air
- Exhaust air scrubber and exhaust air irrigation
- Base cabinet with revolving doors or drawers
- Recirculation air mode possible with suitable activated charcoal fi lterr
Laminar flow
DIN EN 14175
Modular design
Reduce energy consumption
MK Versuchsanlagen Wet Bench: Innovative design for precision work
In the semiconductor industry, metal-free systems are an integral part of many process and production setups. At MK metal-free workstations we manufacture metal-free equipment individually tailored to specific processes, developed and designed according to customer requirements. Laminar flow across the entire work area additionally enables operation under the cleanest conditions (e.g., cleanroom class 3 according to DIN EN ISO 14644 or better). With controlled supply and exhaust air, the focus is on ensuring both product and user protection simultaneously. Common components such as cleaning sinks, ultrasonic baths, or etching basins are custom-made from suitable materials and installed flush and ergonomically into the system. Process equipment such as spin coaters can also be integrated into the workbenches.
Our metal-free Wet Bench stands out due to its modular design, allowing it to be individually configured to meet your process requirements. The protection of both product and user is our top priority. Product protection is achieved through clean, particle-free workspaces of cleanroom class 3* or better, while user protection is ensured by front-sliding controlled airflow volumes**. The use of various inert plastics provides excellent corrosion resistance.
If there is insufficient supply air capacity available in the building, we offer a version with integrated room air intake.
To reduce operating costs, we also offer a variant with an intelligent control system that lowers energy consumption.
* According to DIN EN ISO 14644
** According to DIN EN 14175
| Technical data | ||
| Materials | PP, PET, POM, PFA, PVDF | |
| Operating voltage | 400 V, 5-in | |
| Air volume requirements | Supply air min. 500 m³/h, exhaust air min. 400 m³/h (Width: 1200 mm) | |
| Air velocity in working area | ca. 0.15 m/s | |
| Terminal supply air fi lters | High-performance HEPA fi lter, filter class H13 to U16 (depending on requirements) with pre-filter F9 | |
| Cleanroom classes according DIN EN ISO 14644-1 | Class 3 or better (0.2 μm, 0.3 μm, 0.5 μm, 1 μm, 5 μm) „at rest“ | |
| Compliance with the DIN EN ISO 14175 | Defi ned safety specifications of the retention and air exchange capacity for personal and product protection. | |
| Illuminance | > 750 Lux | |
| Interfaces | Ethernet or other common fieldbus systems and serial interfaces. | |
| Dimensions | 1200 x 975 x 2600 mm (W x D x H), widths 900 mm, 1500 mm and 1800 mm also available | |
| Weight (without equipment) | 260 kg for 1200 mm width (320 kg, 380 kg for higher widths) | |
| Dimensions working area | Width x 635 x 880 mm (W x D x H) | |
| Working height | 700 mm, 900 mm | |
| Front sash opening height | Individually adjustable via PLC | |
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