Cleanroom accessories

Equipment for metalfree workplaces

Whether it’s modular Quick Dump Rinse (QDR) tanks for gentle post-treatment of wafers, fully metal-free furniture for sensitive applications, or thermal digestion units for ultra-trace analysis – all components are thoughtfully designed, durable, and easy to clean. Our product range is complemented by versatile accessories such as funnel sinks, utility rails, and ceiling exhausts, as well as custom solutions tailored precisely to your requirements.

Quick Dump Rinse (QDR)-Basin

After the chemical treatment of wafers for cleaning, etching or stripping applications, it is important to rinse all components properly to avoid chemical residues. Once removed from the chemical bath, the wafer surface is still covered with chemicals that cause a continuous chemical process outside the bath. This chemical process can lead to over-etching or detachment, resulting in production downtime.
To avoid these problems, it is necessary to rinse the wafers properly with Dl water using a quick dump rinse or a quench.

The Quick Dump Rinse (QDR) basin has a modular design. It is therefore possible to disassemble the QDR tank into two separate components and remove them from the system. Additional comfort is provided by the spray and drain system, which is designed to be removed, cleaned or replaced together with the process tank.

Quick Dump Rinse (QDR) basin

Metal-free furniture

Thermal digestion unit (TAE)

Specifically designed for applications in ultra-trace analysis for thermal digestion of samples
Fully encapsulated in PTFE, smooth PFA-coated surface
Shielded power/control cable
20 years proven of coating in toughest environmental conditions and applications
Lightweight
Unique uniform heat distribution
Rapid heating-up at low energy consumption
Save long-term operation due to two independent safety mechanisms
IP67 protected connection plug for simple connection in application room

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