Cleanroom solutions for semiconductor manufacturing

Our metal-free Wet Bench features a modular design and can therefore be individually configured to meet your specific process requirements.

 

Learn how MK Versuchsanlagen Wet Benches meet the highest standards for cleanliness, process reliability, and operator protection.

Cleanroom-compatible metal-free Wet Benches for the highest process requirements

We offer metal-free Wet Benches specifically designed to meet the most demanding cleanliness requirements while ensuring optimal operator and product protection, as well as seamless integration into existing processes.

By combining modular design with cleanroom compatibility, our Wet Benches enable reliable and contamination-free process control for demanding semiconductor applications. With decades of experience, we develop customized solutions precisely tailored to your processes and workflows.

 

Key features

  • Metal-free construction using plastics and optional FM4910-compliant materials
  • Laminar airflow across the entire work area for particle-free environments
  • Operator and product protection in accordance with DIN EN 14175
  • Modular and customized design for the integration of semiconductor process equipment
  • Cleanroom compliance
  • PLC-controlled airflow management for reliable and energy-efficient operation

Your benefits

  • Contamination-free processes through a fully metal-free design
  • Flexibility thanks to an ergonomic and modular concept
  • Enhanced operator protection through sash systems and airflow monitoring
  • Easy integration into existing production and laboratory environments
  • Long-term operational reliability and efficiency
  • Minimization of metal-ion and particle contamination in sensitive semiconductor processes

 

WetBenc for Semiconductor manufacturing

Applications in semiconductor manufacturing

Our metal-free Wet Benches are used wherever cleanliness according to cleanroom standards, process reliability, and operator protection are critical requirements.

Wafer cleaning and etching processes
Contamination-free handling of electronic-grade chemicals for wafer cleaning, etching processes, and surface treatment applications in semiconductor manufacturing.

Quality control and analytical laboratories
Used in cleanroom and ultra-trace laboratories for sample preparation and the analysis of high-purity chemicals and process media, where even the smallest metal or particle contamination can influence analytical results.

MEMS- und Nanotechnology
Flexible integration into demanding microfabrication, sensor, and nanotechnology processes with the highest requirements for cleanliness and process stability.

Optics- and laser technology
Ultra-clean environments for precision manufacturing processes and sensitive optical applications.

Research & development laboratories and pilot plants
Customized configurations for research, development, testing, and scale-up processes.

Designed for maximum cleanliness and safety
With laminar airflow, compliance with DIN EN 14175, and the use of FM4910-certified materials as an option, MK Versuchsanlagen Wet Benches provide the ideal combination of cleanliness, safety, and flexibility for modern semiconductor manufacturing environments.

 

Why are metal-free Wet Benches essential in the semiconductor industry?

Modern semiconductor manufacturing relies on high-purity electronic-grade chemicals and process gases. Even the smallest contamination caused by metal ions, particles, or moisture can affect wafer quality, reduce process stability, and lower production yields.

Particularly critical are metallic contaminants such as sodium (Na), potassium (K), iron (Fe), copper (Cu), and nickel (Ni). Even trace amounts of these elements can impact sensitive semiconductor structures and lead to manufacturing defects. For this reason, both production and analytical processes are designed to meet the highest cleanliness standards.

Metal-free Wet Benches from MK Versuchsanlagen help minimize potential contamination sources. By utilizing metal-free, cleanroom-compatible materials and controlled laminar airflow, they provide optimal conditions for wafer cleaning, etching processes, wet chemical applications, and sample preparation in cleanroom laboratories.

Whether for semiconductor manufacturing, MEMS technology, nanotechnology, or the quality control of electronic-grade chemicals, our Wet Benches support contamination-free process control, improve process reliability, and help ensure compliance with stringent cleanliness requirements in modern cleanroom environments.

Frequently asked questions

We answer frequently asked questions about MK Versuchsanlagen.

K
L

What is a metal-free Wet Bench?

A metal-free Wet Bench is a specialized cleanroom system for wet chemical processes in which all product-contact components are manufactured from non-metallic materials. This prevents metal contamination and ensures compliance with the highest cleanliness requirements.

K
L

Which applications are suitable for metal-free Wet Benches?

Metal-free Wet Benches are particularly suitable for wafer cleaning, etching processes, MEMS manufacturing, nanotechnology, optics production, as well as research and development laboratories.

K
L

Which cleanroom classifications can be achieved?

Depending on the configuration, MK Versuchsanlagen Wet Benches can be designed for cleanroom environments up to ISO Class 3 according to DIN EN ISO 14644.

K
L

Why are FM4910-compliant materials important?

FM4910-certified materials are characterized by low flammability risk and excellent suitability for cleanroom applications. They are widely used in the semiconductor industry to meet the highest safety and quality standards.

Metal-free Wet Benches for the highest cleanliness requirements in Semiconductor manufacturing

Modern semiconductor manufacturing demands uncompromising cleanliness, maximum process reliability, and dependable operator protection. MK Versuchsanlagen’s metal-free Wet Benches have been specifically developed for cleanroom applications and enable contamination-free processing during wafer cleaning, etching operations, and advanced MEMS and nanotechnology applications.

Thanks to their modular design, the Wet Benches can be individually adapted to existing production processes. FM4910-compliant materials, laminar airflow, and cleanroom compatibility up to ISO Class 3 ensure optimal conditions for sensitive manufacturing environments. Integrated PLC-controlled airflow management additionally provides energy-efficient and safe operation.

Cleanroom solutions for wafer processing, MEMS, and nanotechnology

The requirements within the semiconductor industry continue to increase. Metal-free Wet Benches provide a reliable solution for applications where even the smallest metal contamination can impact product quality. Thanks to their fully metal-free design, they support stable processes and maximum manufacturing yields.

MK Versuchsanlagen develops customized cleanroom solutions for wafer cleaning, wet chemical processing, microfabrication, and research laboratories. The combination of DIN EN 14175-compliant operator protection, flexible integration capabilities, and durable construction makes our Wet Benches the ideal solution for modern semiconductor fabrication facilities and development environments.

Metal-free Wet Benches for electronic-grade chemicals

When processing electronic-grade chemicals and high-purity process media, cleanliness and contamination control are critical factors. Metal-free Wet Benches prevent the introduction of unwanted metal ions and support the safe handling of chemicals used for wafer cleaning, etching processes, and other wet chemical applications within the semiconductor industry.

Their cleanroom-compatible design, metal-free construction, and controlled airflow concept help ensure stable process conditions while minimizing contamination risks. As a result, manufacturers benefit from enhanced process reliability, improved product quality, and compliance with stringent cleanliness requirements for advanced semiconductor manufacturing.

 

Contact

Contact us for guidance on your project

Talk to our experts.